Water-cooled Vacuum Test Platform (Vacuum Chamber)
Overview
Water-cooled vacuum test platform: water-cooled chamber (Φ800×800mm inner), ultimate vacuum 4×10⁻⁴Pa, quick-open door, Φ350mm IR fused silica viewport, rotating substrate holder, JTFB-1300Z turbo pump (1300L/s) + DRV30 backing pump, vacuum gauge and thermocouple, touchscreen control with chiller and movable frame, for LIDT testing in vacuum and vacuum coating.Description
Overview
The water-cooled vacuum test platform is an integrated vacuum system designed for high-power laser damage testing, vacuum coating and optical experiments in vacuum environments. Built around a water-cooled vacuum chamber (Φ800×800mm inner), it features a quick-open door, Φ350mm IR fused silica viewport, substrate holder, vacuum gauge, water-cooled turbo pump (1300L/s) and backing pump, reaching ultimate vacuum of 4×10⁻⁴Pa. Touchscreen control, chiller and movable frame complete the system; an in-chamber thermocouple monitors sample temperature and a beam block is fitted to the quick-open door.
Features
- Ultimate vacuum 4×10⁻⁴Pa for LIDT testing and vacuum coating
- Large water-cooled chamber: Φ800×800mm inner
- Φ350mm IR fused silica viewport (1 spare) + Φ100mm ×2
- Flexible substrate holder: Φ300mm ×1 / Φ100mm ×2 / Φ60mm ×5, 360° rotation
- High pumping speed: JTFB-1300Z turbo (1300L/s) + DRV30 backing pump
- Vacuum gauge + in-chamber thermocouple monitoring
- Beam block on quick-open door; pneumatic baffle valve + solenoid fill valve
- Touchscreen control, chiller, oil-free compressor, movable frame
Applications
- High-power laser damage threshold (LIDT) testing in vacuum
- Vacuum coating and thin-film deposition
- Optical experiments and sample irradiation in vacuum
- Material vacuum aging and performance testing
【Contact】
17317958112
Specifications
| Product | Water-cooled Vacuum Test Platform |
| Ultimate Vacuum | 4×10⁻⁴Pa |
| Chamber Inner Size | Φ800×800mm (water-cooled) |
| Quick-open Door | 1 (with beam block) |
| Viewports | Φ350mm IR fused silica window (1 + 1 spare) + Φ100mm ×2 |
| Substrate Holder | Φ300mm ×1 / Φ100mm ×2 / Φ60mm ×5; 360° rotation |
| Turbo Pump | JTFB-1300Z, 1300L/s, water-cooled grease-lubricated |
| Backing Pump | DRV30 rotary vane, 30m³/h, KF40 |
| Vacuum Gauging | Vacuum gauge + in-chamber thermocouple |
| Control | Touchscreen + programmable control (pneumatic baffle valve, solenoid fill valve) |
| Auxiliaries | Chiller, oil-free silent compressor, movable frame (50mm height adjust) |
Technical Data
水冷真空测试平台 主要参数
| 项目 | 参数 |
|---|---|
| 极限真空 | 4×10⁻⁴Pa |
| 真空室内尺寸 | 内径 Φ800×800mm（带水冷保护） |
| 快开门 | 1 个（配置挡光板） |
| 观察窗 | Φ350mm 红外石英玻璃观察窗 1 个（另备 1 块备用）；Φ100mm 观察窗 2 个 |
| 基片架 | Φ300mm 1 片 / Φ100mm 2 片 / Φ60mm 5 片；可旋转 360° |
| 真空计 | 成都睿宝（真空测量） |
| 温度监控 | 真空腔内配置热电偶，检查样品附近温度 |
分子泵 JTFB-1300Z（久泰真空）参数
| 参数 | 数值 |
|---|---|
| 抽气速率 | 1300L/s |
| 压缩比（N₂ / H₂） | ＞10⁹ / ＞1×10⁴ |
| 极限压强 | ＜5×10⁻⁷Pa |
| 电机转数 | 24000rpm |
| 振动值 | ≤0.1μm |
| 启动时间 | ＜5min |
| 冷却方式 | 水冷（冷却水温度 ≤20℃） |
机械泵 DRV30（Baosi）参数
| 参数 | 数值 |
|---|---|
| 抽气速率 | 30m³/h（约 8L/s） |
| 极限压力 | ＜5×10⁻¹Pa |
| 电机功率 | 1.1kW（三相 380V） |
| 进气/出气接口 | KF40 |
| 重量 | 63kg |
水冷真空测试平台结构组成（快开门开启状态：基片架、观察窗、红外石英观察窗、分子泵、触摸屏、真空计、台架）
辅助配置：冷水机、无油静音空压机、台架（带地脚轮可推动，高度可调 50mm）