Etched Fused Silica Engineered Diffusers (GDF Series)
Model：GDF-C0.5；GDF-C1.0 等
Overview
Etched fused silica engineered diffusers (GDF series): refractive bandlimited diffusers with circular flat-top output, divergence angles from 0.5 to 20 degrees, operating spectrum 193-2000 nm (deep-UV capable), 90% efficiency, Corning 7980 HPFS material, 25.4 mm diameter. Ideal for excimer laser homogenization, DUV beam shaping and illumination uniformization.Description
Overview
The GDF series engineered diffusers are refractive, bandlimited diffusers made of etched fused silica. They convert an incident beam into a uniform circular flat-top intensity distribution with controlled divergence (0.5-20 deg FWHM), operating from 193 to 2000 nm including deep-UV, with 90% efficiency (uncoated).
Key Features
- Refractive bandlimited diffuser, circular flat-top output (flatness factor >= 0.70)
- Divergence options: 0.5 / 1.0 / 5.0 / 10.0 / 20.0 deg FWHM
- Operating spectrum 193-2000 nm, deep-UV capable
- 90% efficiency (uncoated); Corning 7980 HPFS fused silica
- 25.4 mm diameter, 1.0 mm thickness, center clear aperture 23.4 mm
- Far-field measurement per ISO 13694:2000
Applications
- Excimer laser beam homogenization
- DUV illumination shaping and uniformization
- Illumination systems requiring flat-top profiles
Specifications
| Diffuser type | Refractive, bandlimited |
| Diffuser pattern | Circle, Flat Top |
| Flatness factor (A) | >= 0.70 |
| Divergence angle (B) | 0.5 / 1.0 / 5.0 / 10.0 / 20.0 deg FWHM |
| Operating spectrum | 193 - 2000 nm |
| Index of refraction | 1.457 @ 633 nm |
| Feature size (C) | 100 um (typical) |
| Clear aperture (D) | Center 23.4 mm |
| Efficiency | 90% (uncoated) |
| Material | Corning 7980 HPFS fused silica |
| Diameter (E) | 25.4 +/- 0.1 mm |
| Thickness (F) | 1.0 +/- 0.1 mm |
| Mount | Unmounted |
Technical Data
Engineered Diffuser Specifications