ATLEX Series Air-Cooled Excimer Lasers (ATL Lasertechnik)
Model：ATLEX-I；ATLEX-M 等
Overview
The ATLEX series from ATL Lasertechnik (Germany) are high-energy air-cooled excimer lasers based on metal-ceramic resonator technology, covering 157/193/248/308/351 nm with repetition rates up to 500 Hz. Featuring fast pre-ionization, solid-state switching and stable energy output, the series includes ATLEX-I (science/medical/industry), ATLEX-M (compact OEM), ATLEX-C (ventilated cabinet) and ATLEX-FBG (fiber Bragg grating writing) models for micromachining, FBG inscription, spectroscopy, mass spectrometry and ophthalmic surgery.Description
Overview
The ATLEX series short-pulse excimer lasers are the flagship products of ATL Lasertechnik GmbH (Germany). Based on metal-ceramic resonator technology, the ATLEX lasers generate high single-pulse energies with pulse widths of a few nanoseconds while strengthening the reliability of all high-voltage components. They cover deep-UV wavelengths including 248 nm, 193 nm and 157 nm — spectral regions not reachable by diode-pumped solid-state lasers.
Key Features
- Ultra-fast pre-ionization technology for high pulse energy at ~ns pulse widths
- Laser cavity < 3 L; metal-ceramic resonator (halogen- and UV-resistant aluminum & ceramic)
- Solid-state high-voltage switch with long lifetime
- Fully air-cooled with temperature control; RS485, RS232 and fiber interfaces
- Energy stabilization mode; integrated 4-valve gas handling; easy-to-purge optical mounts
- CE certified, RoHS compliant
- Excellent uniform rectangular beam profile, superior for material processing and medical applications
Models & Specifications
| Model | Positioning | Wavelength (nm) | Max. pulse energy | Max. avg. power | Rep. rate | Size (L×W×H) | Weight |
|---|---|---|---|---|---|---|---|
| ATLEX-I | Science/Medical/Industrial | 157/193/248/308/351 | 1/10/15/8/7 mJ | 0.2–6.5 W | 300/500 Hz | 540×470×370 mm | 60 kg |
| ATLEX-M | Compact OEM | 157/193/248/308/351 | 1/8/12/7/7 mJ | 0.2–5.5 W | 300/500 Hz | 600×300×400 mm | 50 kg |
| ATLEX-C | M + ventilated gas cabinet | 157/193/248/308/351 | 1/8/12/7/7 mJ | 0.2–5.5 W | 300/500 Hz | 628×350×1130 mm | 105 kg |
| ATLEX-FBG | FBG writing | 193/248 | 8 mJ (193 nm) | 2.0 W | 300/500 Hz | 540×470×370 mm | 60 kg |
Applications
- Micromachining: 10–20 mJ pulses, MW peak power for rapid prototyping, microelectronics, biochips/polyester/glass/silicon/thin metals/ceramics
- Fiber Bragg grating (FBG) inscription with 193 nm and 248 nm pulses
- Spectroscopy: 3–5 ns pulses for photoionization, high-resolution TOF-MS, LA-ICP/ICP-MS ablation
- APLI (Atmospheric Pressure Laser Ionization): PAH determination, polymer research
- Ophthalmic surgery: flying-spot and irregular ablation for myopia/hyperopia/astigmatism
Specifications
| Model | ATLEX-I; ATLEX-M; ATLEX-C; ATLEX-FBG |
| Wavelength | 157 nm (F₂) / 193 nm (ArF) / 248 nm (KrF) / 308 nm (XeCl) / 351 nm (XeF) |
| Max. pulse energy | 1 / 8–15 mJ (depending on wavelength & model) |
| Max. average power | 0.2–6.5 W (300/500 Hz variants) |
| Max. repetition rate | 300 Hz / 500 Hz |
| Pulse width | 4–6 ns (FWHM) |
| Beam size (V×H) | 4 × 6 mm |
| Beam divergence (V×H) | 1 × 2 mrad |
| Energy stability | < 3% (Stand. Dev.) |
| Cooling | Air-cooled (ATLEX-C: ventilated cabinet) |
| Power supply | 230 VAC / 6.3 A / 50–60 Hz / 1 phase |
Technical Data
ATLEX Series Specifications
