


The Multi-Wavelength High-Speed LBIC Detection System (H-LBIC-1000) addresses the high-throughput inspection demand of optoelectronic devices, solar cells and perovskite cells, breaking the bottleneck of slow scan speed in conventional LBIC. High-speed galvanometer scanning, time synchronization and wavelet algorithm optimization enable rapid high-quality imaging; multi-wavelength switching at 455/532/630/808 nm covers silicon, perovskite and CIGS photovoltaic materials, with scan speeds up to 5 kHz.
The H-LBIC-1000 Multi-Wavelength High-Speed Laser Beam Induced Current Detection System is a new-generation high-speed LBIC inspection platform for characterization and defect detection of semiconductor optoelectronic devices, solar cells and perovskite cells. It breaks the bottleneck of slow scan speed and long acquisition time of conventional LBIC, has been applied at Sunpump with ideal results, and reaches an advanced domestic level.
The system is based on point-by-point scanning of the laser beam over the cell surface, exciting localized photovoltaic effects to obtain current response signals. Multi-wavelength sources combined with the absorption characteristics of different materials enable comprehensive analysis of PN junction quality, carrier lifetime and surface recombination rate. High-precision galvanometer scanning and dynamic focusing position the laser spot at the micron scale; photocurrent intensity at each point is synchronously recorded to build a two-dimensional photoresponse map. Machine vision locates defect position and morphology; edge-enhancement algorithms extract low-contrast defect features; spatial-frequency filtering suppresses ambient noise; a Moire reference grating corrects scanning nonlinearity, keeping geometric image accuracy better than ±1.5 μm.

Fig.1 LBIC detection principle

Fig.2 Multi-wavelength beam combining optical path

Fig.3 Hardware layout (darkroom design)
| Parameter | Value |
|---|---|
| Excitation wavelengths | 455/532/630/808 nm integrated |
| Spot diameter | <20 μm (1/e²), stabilized at 15±0.2 μm |
| Working distance | ≥250 mm |
| Sample positioning accuracy | 5 μm |
| Power adjustment | 10%~90% |
| Scan area | 100 mm × 100 mm |
| Scan speed | 5 kHz (up to 8000 points/s) |
| Geometric accuracy | better than ±1.5 μm |
| Signal acquisition | 16-bit, 200 MS/s, channel isolation >80 dB |
The LBIC fast scanning software supports scan settings, device connection, auto-focus, scan mode / range / speed / steps / laser power configuration; results are shown as color heat maps with structured reports containing defect type, coordinates and confidence, meeting high-throughput online inspection needs of PV production lines.

Fig.4 LBIC fast scanning software interface
Sunpump provides full-service support from requirement analysis, system integration, installation and commissioning to training and after-sales service, with flexible configuration.
| wavelength | 532nm,633nm,785nm |
| 分辨率 | 2um-100um |
| 检测速度 | 0.5-10KHZ |