VUV detector
Overview
SLT (Germany) Series PEM VUV energy detectors with vacuum flange, specially designed for 157nm and other wavelengths requiring stirring gas or encapsulated beam guiding; leak tested. Four models cover 10-30mm apertures, MgF2 window or windowless, PEM 30 K VUV up to 30W average power.Description
【Overview】
Series PEM VUV detectors feature a special vacuum flange design for 157nm and all other wavelengths where stirring gas or encapsulated beam guiding are used. The detectors are leak tested one by one for reliable operation in vacuum/gas environments. Four models (PEM 10/20/24 VUV and PEM 30 K VUV), 10-30mm apertures, MgF2 window or windowless.
【Key Features】
(1) Vacuum flange design, individually leak tested;
(2) For 157nm and stirring gas / encapsulated beam wavelengths;
(3) MgF2 window or windowless options;
(4) PEM 30 K VUV up to 30W average power;
(5) Vacuum flange KF16-KF40.
【Typical Applications】
157nm lithography/semiconductor testing, VUV laser energy measurement, encapsulated beam monitoring.
Specifications
| Model | PEM 10 VUV; PEM 20 VUV; PEM 24 VUV; PEM 30 K VUV |
| Aperture | 10mm / 20mm / 24mm / 30mm |
| Sensitivity (1MΩ) | 30-50 V/J / 15-25 V/J / 200 V/J / 1.5-2.5 V/J |
| Repetition rate | 50Hz / 150Hz / 300Hz / 50Hz |
| Max. average power | 5W / 5W / 5W / 30W |
| Accuracy | ±5% |
| Max. energy density (τ=10ns) | 50 mJ/cm² / 50 mJ/cm² / 100 mJ/cm² / 300 mJ/cm² |
| Max. peak power density | 5 MW/cm² / 5 MW/cm² / 5 MW/cm² / 30 MW/cm² |
| Detection threshold | 100µJ / 200µJ / 5µJ / 1mJ |
| Window | MgF2 / MgF2 / none / none |
| Connector | SMA / SMA / BNC / BNC |
| Vacuum connector | KF16 ND / KF25 ND / KF25 ND / KF40 ND |
| Dimension | Ø30mm / Ø42mm / Ø55mm / Ø100mm |
Technical Data
PEM VUV 系列设备实拍与规格表
数据来源：SLT Sensor- und Lasertechnik GmbH 产品目录（Made in Germany）